Low-Stress CMOS-Compatible Silicon Carbide Surface-Micromachining Technology—Part II: Beam Resonators for MEMS Above IC
作者： F Nabki , P-V Cicek , T A Dusatko , M N El-Gamal
DOI: 10.1109/JMEMS.2011.2115130
关键词:
摘要: … While stiffer resonators with wider transducer gaps have … resistance and a wide frequency tuning range. The achieved … of a resonator and extend its electrostatic tuning range. Fig. 22 …
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