Deposition and properties of MoS2 thin films grown by pulsed laser evaporation

摘要: Thin films of MoS2 have been grown on stainless steel substrates by pulsed laser evaporation. Analysis X-ray photoelectron spectroscopy indicates that at substrate temperatures up to 300 °C the same stoichiometry as bulk MoS2; 450 are sulfur rich. The laser-deposited a granular structure and exhibit none dendritic structures typically observed in sputter-deposited films. diffraction some preferred orientation. coefficients friction were measured laboratory air ranged from 0.09 0.25; majority values between 0.16 0.20. These appropriate range for solid lubricant indicate evaporation is clearly feasible technique growing lubricious