A micromachined tunable cavity resonator
作者： D. Mercier , M. Chatras , J. C. Orlianges , C. Champeaux , A. Catherinot
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摘要: This paper focuses on a tunable resonator fabricated using bulk and surface micro-machining techniques. The consists of silicon micro-machined metalized cavity coupled with MEMS bridge capacitor for tunability purposes. is excited coplanar waveguide lines to avoid losses from transitions facilitate measurements. unloaded quality factor the device about 150 depending varactor position simulated tuning range 0.4 GHz (1.45%) at 27.8 GHz.
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sci-hub.se 参考文章(11)
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