A high performance MEMS miniature tunable bandpass filter
作者： A. Abbaspour-Tamijani , L. Dussopt , G.M. Rebeiz
DOI: 10.1109/MWSYM.2003.1210486
关键词:
摘要: A miniature tunable 3-pole filter is fabricated using coplanar waveguide (CPW) transmission-tines on glass substrate (C/sub r/ = 4.6, tan /spl delta/ 0.006) and an array of RF-MEMS varactors. The tuned a bias voltage 0-80 Volts. sim/3.6 mm long gives near ideal frequency response. tuning range 14% from 18.6 to 21.4 GHz was achieved, with constant fractional bandwidth 7.4 plusmn/ 0.1% mid-band insertion loss 3.85-4.15 dB.
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