Self-assembled nanometer lithographic masks and templates and method for parallel fabrication of nanometer scale multi-device structures
作者： Kenneth Douglas , Noel A. Clark , Kenneth J. Rothschild
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摘要: Articles exhibiting fabricated structures with nanometer size scale features (nanostructures), typically a device comprising nanostructures of functional material on or in substrate dissimilar material, are produced by method employing base coating and thin layer serving as lithographic mask template, consisting self-assembled ordered array, periodic array molecules such undenatured proteins, holes, thickness density variations. It is possible to produce complex containing large numbers nanometers elements through small number simple steps.
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