System for evaluating thin film coatings
作者： Erik J. Bjornard , William A. Meredith , Charles C. Gammans , Kelly R. Clayton , Kim D. Powers
DOI:
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摘要: A system for evaluating the reflectance of an object (e.g., a CRT) that is coated with anti-reflective coating material disclosed. The quality and/or uniformity evaluated by reflectometer. reflectometer positioned relative to non-contact sensors. Reflectance data gathered analyzed determine what extent actual differs from optimal (i.e., ideal) coating. feedback modifies process subsequent objects in attempt fine-tune and achieve coatings later passing through system.
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