Optical coatings having a plurality of prescribed properties and methods of fabricating same

摘要: A method is disclosed for specifying the ratios of three or more coating materials so as to specify and control index refraction profile, stress and/or coefficient thermal expansion an optical coating. Also a deposition chamber (10) that includes in-situ monitor (12) measuring within (20). The output compared predicted profiles appropriate corrections are made constants. In presently preferred embodiment, interferometer having sample beam (28a) reflects from surface substrate (22) upon which being formed. change in path length indicative direction magnitude flexure due induced Responsive determined stress, operating parameters varied, if required, maintain at desired type.