Critical factors in quantitative Atomic Force Acoustic Microscopy
作者： F. Marinello , P. Schiavuta , S. Carmignato , E. Savio
DOI: 10.1016/J.CIRPJ.2010.05.004
关键词:
摘要: Abstract Atomic Force Acoustic Microscopy (AFAM) is a scanning probe technique for advanced research in nanomechanical properties, using local elasticity to provide direct and non-destructive mapping of Young's modulus related surface parameters. In this work, an experimental study presented, addressing the performance quantitative AFAM characterization. Different influencing factors are analysed, mainly arising from characteristics (such as cantilever geometry, force constant ultimately resonance frequency) scan settings (speed sample vibration frequency). Investigations encompassed commercial instrument equipped with three different probes, featuring dimensions mechanical properties.
core.ac.uk
elsevier.com
sci-hub.se 参考文章(14)
Francesco Marinello, Atomic Force Microscopy in nanometrology: modeling and enhancement of the instrument ,(2007)
M. Kopycinska-Müller, A. Caron, S. Hirsekorn, U. Rabe, Harald Natter, Rolf Hempelmann, Rainer Birringer, Walter Arnold, Quantitative Evaluation of Elastic Properties of Nano-Crystalline Nickel Using Atomic Force Acoustic Microscopy Zeitschrift für Physikalische Chemie. ,vol. 222, pp. 471- 498 ,(2008) , 10.1524/ZPCH.2008.222.2-3.471
L. De Chiffre, H. Kunzmann, G.N. Peggs, D.A. Lucca, Surfaces in Precision Engineering, Microengineering and Nanotechnology CIRP Annals. ,vol. 52, pp. 561- 577 ,(2003) , 10.1016/S0007-8506(07)60204-2
A.A.G. Bruzzone, H.L. Costa, P.M. Lonardo, D.A. Lucca, Advances in engineered surfaces for functional performance CIRP Annals. ,vol. 57, pp. 750- 769 ,(2008) , 10.1016/J.CIRP.2008.09.003
Malgorzata Kopycinska-Müller, Roy H Geiss, Donna C Hurley, None, Contact mechanics and tip shape in AFM-based nanomechanical measurements. Ultramicroscopy. ,vol. 106, pp. 466- 474 ,(2006) , 10.1016/J.ULTRAMIC.2005.12.006
D. Passeri, M. Rossi, A. Alippi, A. Bettucci, D. Manno, A. Serra, E. Filippo, M. Lucci, I. Davoli, Atomic force acoustic microscopy characterization of nanostructured selenium–tin thin films Superlattices and Microstructures. ,vol. 44, pp. 641- 649 ,(2008) , 10.1016/J.SPMI.2007.10.004
J. Hoffmann, A. Weckenmann, Z. Sun, Electrical probing for dimensional micro metrology Cirp Journal of Manufacturing Science and Technology. ,vol. 1, pp. 59- 62 ,(2008) , 10.1016/J.CIRPJ.2008.06.002
Yu. I. Golovin, Nanoindentation and mechanical properties of solids in submicrovolumes, thin near-surface layers, and films: A Review Physics of the Solid State. ,vol. 50, pp. 2205- 2236 ,(2008) , 10.1134/S1063783408120019
D C Hurley, M Kopycinska-Müller, A B Kos, R H Geiss, Nanoscale elastic-property measurements and mapping using atomic force acoustic microscopy methods Measurement Science and Technology. ,vol. 16, pp. 2167- 2172 ,(2005) , 10.1088/0957-0233/16/11/006
F Marinello, E Savio, P Bariani, S Carmignato, Coordinate metrology using scanning probe microscopes Measurement Science and Technology. ,vol. 20, pp. 084002- ,(2009) , 10.1088/0957-0233/20/8/084002