Coordinate metrology using scanning probe microscopes
作者： F Marinello , E Savio , P Bariani , S Carmignato
DOI: 10.1088/0957-0233/20/8/084002
关键词:
摘要: New positioning, probing and measuring strategies in coordinate metrology are needed for the accomplishment of true three-dimensional characterization microstructures, with uncertainties nanometre range. In present work, implementation scanning probe microscopes (SPMs) as systems is discussed. A new non-raster measurement approach proposed, where moved to sense points along free paths on sample surface, no loss accuracy respect traditional raster scan time reduction. Furthermore, probes featuring long tips innovative geometries suitable through SPMs examined reported.
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