作者: R. Hinrichs , A.P.L. Bertol , S.D. Jacobsen , G. Castellano , M.A.Z. Vasconcellos
DOI: 10.1016/J.NIMB.2013.05.101
关键词:
摘要: Abstract Iron nitride thin films, produced by reactive magnetron sputtering, were characterized with grazing incidence X-ray diffraction, reflectometry, Rutherford backscattering spectrometry (RBS) and conversion electron Mossbauer spectroscopy. Their characteristic L-X-rays spectra, obtained an microprobe analyzer equipped a wavelength dispersive spectrometer, compared to the spectrum of iron standard. The spectra from nitrides presented several chemical effects: change in relative peak areas shifts positions Lα 1,2 Lβ 1 peaks (chemical shift). areas, namely ratio between peaks, correlated well nitrogen content measured RBS.