PRAMS having phase-change layer pattern with electrode contact area and methods of forming the same
作者： Se-Ho Lee , Kyung-Chang Ryoo , Su-Youn Lee , Young-Nam Hwang
DOI:
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摘要: According to some embodiments of the present invention, there are provided PRAMS having a phase-change layer pattern interposed between molding and forming pattern, methods same that include node conductive layer, protecting layer. The formed cover planarized interlayer insulating pattern. A lower electrode is on spacer disposed
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