Programmable via devices in back end of line level
作者： Dennis M. Newns , Lia Krusin-Elbaum , Kuan-Neng Chen , Sampath Purushothaman
DOI:
关键词: Via device 、 Fabrication 、 Isolation layer 、 Optoelectronics 、 Layer (electronics) 、 Electrical engineering 、 Back end of line 、 Materials science 、 Dielectric layer 、 Phase-change material 、 Electrical conductor
摘要: Programmable via devices and methods for the fabrication thereof are provided. In one aspect, a programmable device is The comprises first dielectric layer; at least isolation layer over heater within capping side of opposite extending through portion in contact with heater, comprising phase change material; conductive cap via; second via, each layer, heater; third cap.
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