Planar double-grating microspectrometer
作者： Semen Grabarnik , Reinoud Wolffenbuttel , Arwin Emadi , Mikhail Loktev , Elena Sokolova
DOI: 10.1364/OE.15.003581
关键词:
摘要: We report on a miniature spectrometer with volume of 0.135 cm3 and dimensions 3×3×11 mm, mounted directly the surface CCD sensor. The is formed by two flat diffraction gratings that are designed to perform both dispersion imaging functions, eliminating need for any spherical optics. Two separate parts device were fabricated single-mask 1 μm lithography single glass wafer. wafer was diced assembled onto resolution 3 nm, spectral range 450 750 nm optical throughput ∼9% measured be in complete agreement model used development device.
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