Image Sensor Having Enhanced Backside Illumination Quantum Efficiency
作者： Jen-Cheng Liu , Han-Chi Liu , Yuan-Hung Liu , Yin-Kai Liao , Dun-Nian Yaung
DOI:
关键词:
摘要: A system and method for image sensing is disclosed. An embodiment comprises a substrate with pixel region logic region. first resist protect oxide (RPO) formed over the region, but not Silicide contacts are on top of active devices in surface silicide both second RPO contact etch stop layer RPO. These layers help to reflect light back sensor when impinges from backside substrate, also helps prevent damage that occurs overetching.
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