Solid-state image sensor, method for manufacturing the same, and camera
作者： Yusuke Onuki , Kentarou Suzuki
DOI:
关键词:
摘要: A method for manufacturing a solid-state image sensor having pixel region, peripheral circuit and an intermediate region interposed between the includes forming high melting point metal compound in active regions of etch stop film on formed interlayer insulating film, forming, by using contact plug to region.
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