Multi-functional linear siloxane compound, a siloxane polymer prepared from the compound, and a process for forming a dielectric film by using the polymer

摘要: A novel multi-functional linear siloxane compound, a polymer prepared from the and process for forming dielectric film by using polymer. The has enhanced mechanical properties (e.g., modulus), superior thermal stability, low carbon content hygroscopicity is homopolymerization of compound or copolymerization with another monomer. can be produced heat-curing coating solution containing which highly reactive. not only satisfactory properties, stability crack resistance, but also exhibits excellent compatibility pore-forming materials, leads to constant. Furthermore, retains relatively high SiO 2 content, resulting in its improved applicability semiconductor devices. Therefore, advantageously used as material films