Vibrating micromechanical sensor of angular velocity
作者： Anssi Blomqvist
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摘要: The invention relates to measuring devices be used in the of angular velocity and, more precisely, vibrating micromechanical sensors velocity. In a sensor according invention, mass is supported frame component by means an asymmetrical spring structure (1), (2), (3), (4), (22), (24) such way, that coupling from one mode motion another, conveyed (24), cancels or alleviates caused non-ideality due skewness springs their support. enables reliable with good performance, particularly small solutions for
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