Scanning Probe Based Nanolithography and Nanomanipulation on Graphene
作者： Pasqualantonio Pingue
DOI: 10.1007/978-1-4419-9899-6_10
关键词:
摘要: Alternative lithographic techniques, in particular those based on scanning probe microscopy, have shown a great potential for fabricating nanostructures using various material and allowing high spatial resolution, alignment capabilities high-resolution imaging during the different steps. More specifically, atomic force microscope (AFM) tunneling (STM) been recent past employed to image modify at nanometer scale new carbon discovered 2004 called graphene, single layer of atoms arranged honeycomb crystal lattice. In this chapter review results obtained by nanofabrication graphene is presented. It focused nanomanipulation, local anodic oxidation (LAO), electrochemical or thermal-stimulated desorption, static dynamic ploughing as well other AFM STM techniques imaging, lithography spectroscopy.
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