Metal-insulator-metal (mim) capacitor and fabrication method for making the same
作者： Jing-Horng Gau
DOI:
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摘要: A metal-insulator-metal (MIM) capacitor includes a first metal plate; dielectric layer disposed on the plate and second stacked layer. The plate, layer, constitute lower capacitor. is plate. third an upper are electrically connected to terminal of MIM capacitor, while
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