Crystallization of amorphous In2O3–10 wt % ZnO thin films annealed in air
作者： Burag Yaglioglu , Hyo-Young Yeom , David C. Paine
DOI: 10.1063/1.1977209
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摘要: We report on the crystallization of amorphous indium zinc oxide (a-IZO) with stoichiometry In2Zn0.38O3.38 (In2O3–10 wt % ZnO) thin films deposited by dc magnetron sputtering. Transmission electron microscopy and glancing incidence x-ray diffraction were used to show that, when annealed in air at 500 °C, product a-IZO film is a compositionally modulated crystal high-pressure corundum In2O3 phase. The composition, microstructure, resistivity, carrier density, mobility this new IZO phase are reported compared bixbyite ITO (In2O3–9.8wt%SnO2) under identical conditions.
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sci-hub.se 参考文章(7)
Horst Kasper, Neuartige Phasen mit wurtzitähnlichen Strukturen im System ZnOIn2O3 Zeitschrift für anorganische und allgemeine Chemie. ,vol. 349, pp. 113- 123 ,(1967) , 10.1002/ZAAC.19673490302
J R Bellingham, W A Phillips, C J Adkins, Electrical and optical properties of amorphous indium oxide Journal of Physics: Condensed Matter. ,vol. 2, pp. 6207- 6221 ,(1990) , 10.1088/0953-8984/2/28/011
Charles T. Prewitt, Robert D. Shannon, Donald Burl Rogers, Arthur W. Sleight, C rare earth oxide-corundum transition and crystal chemistry of oxides having the corundum structure Inorganic Chemistry. ,vol. 8, pp. 1985- 1993 ,(1969) , 10.1021/IC50079A033
Yuzo Shigesato, Satoru Takaki, Takeshi Haranoh, Electrical and structural properties of low resistivity tin‐doped indium oxide films Journal of Applied Physics. ,vol. 71, pp. 3356- 3364 ,(1992) , 10.1063/1.350931
Toshihiro Moriga, Doreen D. Edwards, Thomas O. Mason, George B. Palmer, Kenneth R. Poeppelmeier, Jon L. Schindler, Carl R. Kannewurf, Ichiro Nakabayashi, Phase relationships and physical properties of homologous compounds in the zinc oxide-indium oxide system Journal of the American Ceramic Society. ,vol. 81, pp. 1310- 1316 ,(2005) , 10.1111/J.1151-2916.1998.TB02483.X
Yeon Sik Jung, Ji Yoon Seo, Dong Wook Lee, Duk Young Jeon, Influence of DC magnetron sputtering parameters on the properties of amorphous indium zinc oxide thin film Thin Solid Films. ,vol. 445, pp. 63- 71 ,(2003) , 10.1016/J.TSF.2003.09.014
Peter R. Buseck, John M. Cowley, Modulated and intergrowth structures in minerals and electron microscope methods for their study. American Mineralogist. ,vol. 68, pp. 18- 40 ,(1983)