Microelectromechanical structure and a method for making the same
作者： Satyadev Patel , Jonathan Doan
DOI:
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摘要: A microstructure and the method for making same are disclosed herein. The has structural members, at least one of which comprises an intermetallic compound. In such a microstructure, sacrificial material is employed. After completion forming layers, removed by spontaneous vapor phase chemical etchant.
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