Method of forming light beam and method of fabricating semiconductor integrated circuits
作者： Yoshihiko Okamoto
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摘要: Technology for forming a fine light beam having size smaller than the theoretical limit determined by wavelength of and characteristics an objective lens. A distribution shifter two transmission regions is disposed between source lens, phase provided on one to divide passing through into fluxes phases opposite each other, are focused lens form due destructive interference fluxes.
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