Plasma Electronics: Applications in Microelectronic Device Fabrication

摘要: Introduction Plasma and Its Classification Application of Low Temperature Academic Fusion References Phenomenological Description the Charged Particle Transport in Real (Configuration) Space Momentum Balance Electrons Energy Velocity Electron Distribution Swarm Parameters Ion Mean Thermal Equilibrium its Governing Relations Boltzmann Maxwell Macroscopic Characteristics Quasi Neutrality Charge separation In Plasmas Spatial Scale Charge-Separation Time for Shielding Debye Metal Probe a Diffusion Ambipolar Bohm Sheath Criterion Floating Potential Elementary Processes Gas Phase on Surfaces Particles Waves Representation Classical Quantum Mechanics Locally Isolated Group Wave Packets Collisions Cross Sections Conservation Laws Definition Collision The Free Paths Laboratory CM Reference Frames Theory Scattering Conditions Applicability Of Differential Section sigma(theta) Modified Effective Range Between And Neutral Atoms/Molecules Resonant Electron-Atom Levels Atoms Electron-Molecule Rotational, Vibrational, Electronic Molecules Rotational Excitation Vibrational Dissociation States with Excited Nonconservative With Electron-Induced Ionization Attachment Dissociative Nondissociative Pair Formation to Rate Coefficients Electron-Ion Ion-Ion Recombination Electron-Electron Heavy Ion-Molecule Transfer, Elastic, Inelastic Ions Reactions Fast Neutrals Chemi-Ionization Penning Slow Quenching Kinetics Photons Ionized Gases Emission Absorption Line Radiation Trapping at Solids from Photo-Emission Thermionic Field-Induced Ejection by Surface Neutralization Adsorption Equation Equations Derivation Number Density Term Integral between an Molecule Elastic Jelas Jex Jion Jatt For Spherical Harmonics Their Properties under Uniform Density: g0 Proportional rn(r, t): g1 General DC Electric Fields Drift Excitation, Ionization, Rates Radio Frequency Relaxation Constants Field Approximation Expansion Procedure Direct Numerical Time-Varying Dc Modeling Nonequilibrium (Low Temperature) Continuum Models Model Local (LFA) Quasi-Thermal (QTE) (RCT) Kinetic Monte Carlo Simulations (MCSs) Particle-in-Cell (PIC) Particle-in-Cell/Monte Simulation (PIC/MCS) Hybrid Circuit Equivalent CCP ICP Transmission-Line (TLM) Electromagnetic Maxwell's Coulomb's Law, Gauss's Poisson's Faraday's Law Ampere's Constant System Collision-Oriented Species-Oriented Plasma-Oriented Constant/Dielectric Techniques To Solve Dependent Time-Evolution Method Finite Difference Digitalization Stabilization Discretization Accuracy Scharfetter-Gummel Cubic Interpolated Pseudoparticle Semi-Implicit Solving Boundary Ideal - Without Interactions Dirichlet Condition Neumann Periodicity Electrode Metallic Dielectric Exchange Mass Etching Deposition Sputtering Moving Processing Capacitively Coupled Capacitive Coupling Mechanism Maintenance Low-Frequency High-Frequency Electronegative Very Two-Frequency Pulsed Inductively Inductive E-mode H-mode Effect Metastables Function Transition E-Mode H-Mode Propagation Skin Depth Magnetically Enhanced Current Magnetron Unbalanced Magnetic Confinements Related Topics Physical Target Erosion Sputtered Chemical Vapor CVD Large-Area High Wafer Bias On Electrically Wafers (without Radio-Frequency Bias) Selection Feed Si or Poly-Si Al SiO2 Feature Profile Evolution Bosch Process Charging Damage Continuity Conductivity Lower Thin Elements ULSI Specific Fabrication MOS Transistor Gate Contact Hole Low-K MEMS Atmospheric Pressure, Fundamental Historical Development Micro Radiofrequency Micro-Plasma Source Heating Index