Low-pressure detachment nanolithography.
作者： J K Kim , J W Park , H Yang , M Choi , J H Choi
DOI: 10.1088/0957-4484/17/4/017
关键词:
摘要: A simple, one-step method is developed to fabricate various nanostructures such as nanoholes and nanolines based on the detachment of an organic polymer film in contact …
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