Low temperature interdiffusion in Au/In thin film couples
作者： J. Bjøntegaard , L. Buene , T. Finstad , O. Lønsjø , T. Olsen
DOI: 10.1016/0040-6090(83)90252-3
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摘要: Abstract Interdiffusion in Au/In thin film couples was studied by situ backscattering spectrometry. The substrate temperature varied the range from -170 to +50 °C. It found that a uniform layer of AuIn 2 grows at same rate as which gold condenses onto an indium for temperatures down -50 This is fastest formation intermetallic phases has been reported. By lowering during evaporation suppressed. In this case couple be raised considerably (to about 20 °C) obtain interdiffusion within reasonable time, and final state different obtained when phase completed evaporation. A possible explanation behaviour discussed. growth after may characterized activation energy 0.23 eV.
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