Statistical evaluation of refractive index, growth rate, hardness and Young's modulus of aluminium oxynitride films
作者： Sabine Dreer , Robert Krismer , Peter Wilhartitz , Gernot Friedbacher
DOI: 10.1016/S0040-6090(99)00564-7
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摘要: Abstract Aluminium oxynitride films were produced by reactive dc-magnetron sputtering with compositions covering the concentration range from nitride to oxide. The altered deposition parameters power and gas flow rates of argon, nitrogen oxygen. refractive index growth rate determined spectroscopic ellipsometry, which showed negligible absorption. With indentation a nano hardness tester Young's modulus obtained. results these measurements evaluated statistical software. dependences physical properties on film thickness quantified. still had some influence nano-indentation resulting substrate. Furthermore, composition represented oxygen content evaluated. However, evaluations only delivered useful for hardness. It is shown that aluminium can be controlled utilising design experiment evaluation software, delivering correct parameters. For all mentioned graphs are given depicting actual measurement 26 films.
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