Method for manufacturing solar cell

作者: Gui Ryong Ahn , Dong Ho Lee , Yong Hwa Lee , Jae Eock Cho , Deoc Hwan Hyun

DOI:

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摘要: A method for manufacturing a solar cell includes performing dry etching process to form textured surface including plurality of minute protrusions on first semiconductor substrate, cleansing removing damaged portions surfaces the using basic chemical and impurities adsorbed protrusions, second remaining or again an acid after process, forming emitter region at substrate.

参考文章(216)
Giuseppe Scardera, Maxim Kelman, Shannon Dugan, Dmitry Poplavskyy, Daniel Aneurin Inns, Karim Lotfi Bendimerad, Method for manufacturing an interdigitated back contact solar cell ,(2015)
Te-Fu Tseng, Chi-Hung Liao, Chai-Der Chang, Cheng-Yu Chu, Method to reduce device contact resistance using a hydrogen peroxide treatment ,(1999)
William R. Livesay, Scott M. Zimmerman, Karl W. Beeson, Dual sided processing and devices based on freestanding nitride and zinc oxide films ,(2009)
Kartik Ramaswamy, Kenneth S. Collins, Amir Al-Bayati, Hiroji Hanawa, Andrew Nguyen, Tsutomu Tanaka, Plasma immersion ion implantation reactor having multiple ion shower grids ,(2004)
Nobuhiko Sato, Katsumi Nakagawa, Kazuaki Ohmi, Kiyofumi Sakaguchi, Kazutaka Yanagita, Takao Yonehara, Method of separating composite member and process for producing thin film ,(2000)
Armin Gerhard Aberle, Timothy Michael Walsh, Stewart Ross Wenham, Thin-Film Solar Cell Interconnection ,(2005)