作者: Gui Ryong Ahn , Dong Ho Lee , Yong Hwa Lee , Jae Eock Cho , Deoc Hwan Hyun
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摘要: A method for manufacturing a solar cell includes performing dry etching process to form textured surface including plurality of minute protrusions on first semiconductor substrate, cleansing removing damaged portions surfaces the using basic chemical and impurities adsorbed protrusions, second remaining or again an acid after process, forming emitter region at substrate.