Method of manufacturing an n-channel mos field-effect transistor

作者: A Jaddam

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摘要: The process for fabricating an N-channel enhancement type fieldeffect semiconductor device includes the step of implanting impurity atoms to form a channel region in high resistivity substrate between source and drain regions. By utilizing ion implantation, amount location impurities can be accurately controlled. During subsequent growth gate oxide layer, distribution is changed provide having desired operating characteristics.