Memories with cylindrical read/write stacks
作者： Yao-Sheng Lee , Henry Chien , George Samachisa , Johann Alsmeier
DOI:
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摘要: A three-dimensional memory is formed as an array of elements across multiple layers positioned at different distances above a semiconductor substrate. Cylindrical stacks are where cylindrical opening has read/write material deposited along its wall, and vertical bit line central axis. Memory on either side such cylinder may include sheet electrodes that extend into the material.
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