MBE growth of terahertz quantum cascade lasers
作者： H.E. Beere , J.C. Fowler , J. Alton , E.H. Linfield , D.A. Ritchie
DOI: 10.1016/J.JCRYSGRO.2004.12.172
关键词:
摘要: Abstract Details of the design, growth, fabrication, and operation quantum cascade lasers (QCLs) that emit in terahertz region (1–10 THz) electromagnetic spectrum are presented. Issues associated with precision, stability, uniformity molecular beam epitaxy (MBE) growth conditions needed to achieve optimum device performance discussed. Results from very first QCL shown, demonstrating precision MBE growth. Next, reproducibility manufacture is investigated. X-ray emission spectra repeat growths laser structure show excellent agreement between intended design values actually grown samples. Device light-current characteristics an improvement when progressively ‘cleaner’ regimes chamber's cycle. Finally, results approximately 20 QCLs, comprising a variety different active designs, over large frequency range (2.4–4.7 THz, 125–64 μm) powers ranging 0.1 56 mW reported.
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