Methods of forming electronic devices including filling porous features with a polymer
Jong Keun Park , Phillip D Hustad , AQAD Emad , Mingqi Li
5
2016
Pore-fill compositions
AQAD Emad , Jong Keun Park , Phillip D Hustad , Mingqi Li
3
2016
Polymers and photoresist compositions
Yang Song , Jong Keun Park , AQAD Emad , Mingqi Li
2021
Enabling Moore's Law through chemistry
Peter Trefonas , James Cameron , James Thackeray , Mingqi Li
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY 255
2018
Neutral layer polymers, methods of manufacture thereof and articles comprising the same
Peter Trefonas III , Phillip D Hustad , Deyan Wang , Rahul Sharma
26
2016
Orientation control layer formed on a free top surface of a first block copolymer from a mixture of first and second block copolymers
Peter Trefonas III , Deyan Wang , Rahul Sharma , Phillip D Hustad
17
2017
New materials for directed self-assembly for advanced patterning
Jieqian Zhang , Janet Wu , Mingqi Li , Valeriy V Ginzburg
Advances in Patterning Materials and Processes XXXI 9051 264 -273
11
2014
Impact of materials selection on graphoepitaxial directed self-assembly for line-space patterning
Dung Quach , Valeriy V Ginzburg , Mingqi Li , Janet Wu
Alternative Lithographic Technologies VII 9423 121 -129
5
2015
Development of spin-on metal hardmask (SOMHM) for advanced node
Shintaro Yamada , Deyan Wang , Vivian Chuang , Cong Liu
Advances in Patterning Materials and Processes XXXII 9425 479 -489
5
2015
Methods for manufacturing block copolymers and articles manufactured therefrom
Jieqian Zhang , Phillip D Hustad , Peter Trefonas III , Mingqi Li
3
2017
Methods for manufacturing block copolymer compositions and articles manufactured therefrom
Jieqian Zhang , Phillip D Hustad , Peter Trefonas III , Mingqi Li
2
2017
Challenges and opportunities in material development and understanding that enables advanced photolithography
Mingqi Li , Emad Aqad , Tomas Marangoni , James F Cameron
Advances in Patterning Materials and Processes XL 12498 124980H -124980H
1
2023
Block copolymers and pattern treatment compositions and methods
Huaxing Zhou , Vipul Jain , Jin Wuk Sung , Peter Trefonas III
1
2018
Aromatic resins for underlayers
CUI Li , Sung Wook Cho , Mingqi Li , Shintaro Yamada
1
2017
Photoresist compositions and pattern formation methods
Xisen Hou , Mingqi Li , Joshua Kaitz , Tomas Marangoni
2022
Nanoporous films with controllable porosity and pore morphologies
Nari Kang , Jiandong Pang , Mingqi Li , Eric Leonhardt
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY 258
2019
Methods for manufacturing block copolymers and articles manufactured therefrom
Jieqian Zhang , Phillip D Hustad , Peter Trefonas III , Mingqi Li
2019
Neutral layer polymers, methods of manufacture thereof and articles comprising the same
Peter Trefonas III , Phillip D Hustad , Deyan Wang , Rahul Sharma
2019
High Resolution Lithography Via Block Copolymers and Self-Assembling Surface Neutral Layers
Peter Trefonas , Jong Keun Park , Mingqi Li , Janet Wu
2017 AIChE Annual Meeting
2017
Photoactive compounds, photoresist compositions including the same, and pattern formation methods
AQAD Emad , Tomas Marangoni , CEN Yinjie , Paul J LaBeaume
2024