Photoresist compositions and methods
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1
2023
High contact angle embedded barrier layer materials for next-generation 193 immersion lithography
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Advances in Patterning Materials and Processes XXXVIII 11612 187 -196
1
2021
Photoresist compositions and pattern formation methods
Ke Yang , Mingqi Li , LEE Choong-Bong , Cheng-Bai Xu
2023
Pattern treatment methods
Jong Keun Park , Mingqi Li , Amy M Kwok , Phillip D Hustad
12
2018
Pattern treatment methods
Huaxing Zhou , Mingqi Li , Vipul Jain , Jong Keun Park
10
2017
Gap-fill methods
Jong Keun Park , Cheng-Bai Xu , Phillip D Hustad , Mingqi Li
6
2015
Compositions and methods for pattern treatment
Vipul Jain , Mingqi Li , Huaxing Zhou , Jong Keun Park
5
2017
Pattern treatment methods
Jin Wuk Sung , Mingqi Li , Jong Keun Park , Joshua A Kaitz
3
2018
Gap-fill methods
Jae Hwan Sim , Jin Hong Park , Jae-bong Lim , Jung Kyu Jo
1
2017
Advanced hole patterning technology using soft spacer materials (Conference Presentation)
Jong Keun Park , Phillip D Hustad , Emad Aqad , David Valeri
Advances in Patterning Materials and Processes XXXIV 10146 301 -301
2017
Photoresist topcoat compositions and methods of processing photoresist compositions
Irvinder Kaur , Chunyi Wu , Joshua A Kaitz , Mingqi Li
1
2019
POLYMER, PHOTORESIST COMPOSITIONS INCLUDING THE SAME, AND PATTERN FORMATION METHODS
Tomas Marangoni , Huan He , Joshua Kaitz , Li Cui
2024
Polymers and photoresist compositions
AQAD Emad , Cong Liu , Cheng-Bai Xu , Mingqi Li
18
2020
Wet-strippable silicon-containing antireflectant
Owendi Ongayi , Charlotte Cutler , Mingqi Li , Shintaro Yamada
17
2018
Base reactive photoacid generators and photoresists comprising same
AQAD Emad , Mingqi Li , Cheng-Bai Xu , Deyan Wang
16
2015
Photoacid generators and photoresists comprising same
Mingqi Li , Cheng-Bai Xu , AQAD Emad , Cong Liu
14
2012
Photoacid generators and photoresists comprising same
Mingqi Li , AQAD Emad , Cong Liu , Joseph Mattia
12
2016
Photoacid generating compound and photoresist composition comprising same, coated article comprising the photoresist and method of making an article
AQAD Emad , Cheng-Bai Xu , Cong Liu , Mingqi Li
11
2015
Topcoat compositions and photolithographic methods
Cong Liu , Deyan Wang , Cheng-Bai Xu , Mingqi Li
9
2016
Lactone photoacid generators and resins and photoresists comprising same
AQAD Emad , Mingqi Li , Cheng-Bai Xu , Cong Liu
7
2017