4H-SiC MISFETs with nitrogen-containing insulators

Masato Noborio , Jun Suda , Svetlana Beljakowa , Michael Krieger
Physica Status Solidi (a) 206 ( 10) 2374 -2390

63
2009
An adapted method for analyzing 4H silicon carbide metal-oxide-semiconductor field-effect transistors

Martin Hauck , Johannes Lehmeyer , Gregor Pobegen , Heiko B. Weber
Communications in Physics 2 ( 1) 5

24
2019
Hall Scattering Factor of Holes and Shallow Defect Centers in Aluminum-doped SiC

Gerhard Pensl , Florin Ciobanu , Michael Krieger , Michael Laube
MRS Proceedings 742 ( 1) 321 -3212

2002
On deep level transient spectroscopy of extended defects in n-Type 4H-SiC

Jonas Weber , Heiko B. Weber , Michael Krieger
Materials Science Forum 897 201 -204

5
2016
Analysis of Compensation Effects in Aluminum-Implanted 4H-SiC Devices

Julietta Weiße , Martin Hauck , Tomasz Sledziewski , Mattias Tschiesche
Materials Science Forum 924 184 -187

7
2018
Determination of Performance-Relevant Trapped Charge in 4H Silicon Carbide MOSFETs

Fabian Rasinger , Gregor Pobegen , Thomas Aichinger , Heiko B. Weber
Materials Science Forum 924 277 -280

2
2018
Iron-Related Defect Centers in 4H-SiC Detected by Deep Level Transient Spectroscopy

Lia Trapaidze , R. Hollweck , Svetlana Beljakowa , Bernd Zippelius
Materials Science Forum 679-680 257 -260

5
2011
Iron-Related Defect Centers in 3C-SiC

Thanos Tsirimpis , S. Beljakova , Bernd Zippelius , Heiko B. Weber
Materials Science Forum 679-680 265 -268

1
2011
Thermally-Assisted Tunneling Model for 3C-SiC p+-n Diodes

Bernd Zippelius , Michael Krieger , Heiko B. Weber , Gerhard Pensl
Materials Science Forum 679-680 571 -574

1
2011
Influence of Growth Rate and C/Si-Ratio on the Formation of Point and Extended Defects in 4H-SiC Homoepitaxial Layers Investigated by DLTS

Bernd Zippelius , Michael Krieger , Heiko B. Weber , Gerhard Pensl
Materials Science Forum 615-617 393 -396

3
2009
High Channel Mobility of 4H-SiC MOSFETs Fabricated by Over-Oxidation of the N-/Al-Coimplanted Surface Layer

Sergey A. Reshanov , Svetlana Beljakowa , Thomas Frank , Bernd Zippelius
Materials Science Forum 615-617 765 -768

2
2009
Interface States in 4H- and 6H-SiC MOS Capacitors: A Comparative Study between Conductance Spectroscopy and Thermal Dielectric Relaxation Current Technique

Lars S. Løvlie , Ioana Pintilie , S. Kumar C.P. , Ulrike Grossner
Materials Science Forum 615-617 497 -500

1
2009
Temperature-Dependence of the Leakage Current of 3C-SiC p+-n Diodes Caused by Extended Defects

Bernd Zippelius , Michael Krieger , Heiko B. Weber , Gerhard Pensl
Materials Science Forum 343 -346

2010
Detection and Electrical Characterization of Defects at the SiO2/4H-SiC Interface

Michael Krieger , Svetlana Beljakowa , Bernd Zippelius , Valeri V. Afanas'ev
Materials Science Forum 645-648 463 -468

18
2010
Preannealing Effect on Mobility of N-/Al-Coimplanted and Over-Oxidized 4H-SiC MOSFETs

Yuichiro Nanen , Bernd Zippelius , Svetlana Beljakowa , Lia Trapaidze
Materials Science Forum 645-648 487 -490

5
2010
Shallow Defects Observed in As-Grown and Electron-Irradiated or He+-Implanted Al-Doped 4H-SiC Epilayers

Svetlana Beljakowa , Sergey A. Reshanov , Bernd Zippelius , Michael Krieger
Materials Science Forum 427 -430

2
2010
Electrical Activation of B+-Ions Implanted into 4H-SiC

Thanos Tsirimpis , Michael Krieger , Heiko B. Weber , Gerhard Pensl
Materials Science Forum 645-648 697 -700

7
2010
Reactive-Ion-Etching Induced Deep Levels Observed in n-Type and p-Type 4H-SiC

Koutarou Kawahara , Giovanni Alfieri , Michael Krieger , Tsunenobu Kimoto
Materials Science Forum 645-648 759 -762

2010
Effect of phosphorus implantation prior to oxidation on electrical properties of thermally grown SiO2/4H-SiC MOS structures

Aleksey Mikhaylov , Tomasz Sledziewski , Alexey Afanasyev , Victor Luchinin
Materials Science Forum 806 133 -138

8
2014
Reduction of Implantation-Induced Point Defects by Germanium Ions in n-Type 4H-SiC

Tomasz Sledziewski , Gunter Ellrott , W. Rösch , Heiko B. Weber
Materials Science Forum 347 -350

2
2015