Lateral transport properties of Nb-doped rutile- and anatase-TiO2 films epitaxially grown on c-plane GaN

作者: S. F. Chichibu , K. Hazu , T. Ohtomo , T. Nakayama , A. Tanaka

DOI: 10.1063/1.4746406

关键词: OptoelectronicsAnalytical chemistryAnataseX-ray photoelectron spectroscopyRutileNiobiumWide-bandgap semiconductorEpitaxyMaterials scienceElectron mobilityHeterojunction

摘要: Valence-band offsets for Nb-doped (100) rutile (R-TiO2) epilayer on (0001) GaN and (001) anatase (A-TiO2) mixed with R-TiO2 were determined using x-ray photoelectron spectroscopy to be +0.2 eV +0.6 eV, respectively. Accordingly, they form type-I type-II heterojunctions, The electron mobility as high 260 cm2 V−1 s−1 was measured the A(+R)-TiO2:Nb undoped GaN, which is quantitatively explained in terms of accumulation at interfacial region GaN. intrinsic approximately 30 cm2 V−1 s−1 300 K obtained grown a p-type

参考文章(22)
Yutaka Furubayashi, Taro Hitosugi, Yukio Yamamoto, Kazuhisa Inaba, Go Kinoda, Yasushi Hirose, Toshihiro Shimada, Tetsuya Hasegawa, A transparent metal: Nb-doped anatase TiO2 Applied Physics Letters. ,vol. 86, pp. 252101- ,(2005) , 10.1063/1.1949728
H. Tang, K. Prasad, R. Sanjinès, P. E. Schmid, F. Lévy, Electrical and optical properties of TiO2anatase thin films Journal of Applied Physics. ,vol. 75, pp. 2042- 2047 ,(1994) , 10.1063/1.356306
Taro Hitosugi, Yasushi Hirose, Junpei Kasai, Yutaka Furubayashi, Makoto Ohtani, Kiyomi Nakajima, Toyohiro Chikyow, Toshihiro Shimada, Tetsuya Hasegawa, Heteroepitaxial Growth of Rutile TiO2 on GaN(0001) by Pulsed Laser Deposition Japanese Journal of Applied Physics. ,vol. 44, ,(2005) , 10.1143/JJAP.44.L1503
L. Forro, O. Chauvet, D. Emin, L. Zuppiroli, H. Berger, F. Lévy, High mobility n‐type charge carriers in large single crystals of anatase (TiO2) Journal of Applied Physics. ,vol. 75, pp. 633- 635 ,(1994) , 10.1063/1.355801
Naoomi Yamada, Taro Hitosugi, Junpei Kasai, Ngoc Lam Huong Hoang, Shoichiro Nakao, Yasushi Hirose, Toshihiro Shimada, Tetsuya Hasegawa, Direct growth of transparent conducting Nb-doped anatase TiO2 polycrystalline films on glass Journal of Applied Physics. ,vol. 105, pp. 123702- ,(2009) , 10.1063/1.3148267
J. R. Waldrop, R. W. Grant, S. P. Kowalczyk, E. A. Kraut, Measurement of semiconductor heterojunction band discontinuities by x‐ray photoemission spectroscopy Journal of Vacuum Science and Technology. ,vol. 3, pp. 835- 841 ,(1985) , 10.1116/1.573326
A. Fouda, K. Hazu, M. Haemori, T. Nakayama, A. Tanaka, S. F. Chichibu, Transparent semiconducting Nb-doped anatase TiO2 films deposited by helicon-wave-excited-plasma sputtering Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. ,vol. 29, pp. 011017- ,(2011) , 10.1116/1.3525918
Kai Cheng, Hu Liang, Marleen Van Hove, Karen Geens, Brice De Jaeger, Puneet Srivastava, Xuanwu Kang, Paola Favia, Hugo Bender, Stefaan Decoutere, Johan Dekoster, Jose Ignacio del Agua Borniquel, Sung Won Jun, Hua Chung, AlGaN/GaN/AlGaN Double Heterostructures Grown on 200 mm Silicon (111) Substrates with High Electron Mobility Applied Physics Express. ,vol. 5, pp. 011002- ,(2012) , 10.1143/APEX.5.011002
S. F. Chichibu, T. Yoshida, T. Onuma, H. Nakanishi, Helicon-wave-excited-plasma sputtering epitaxy of ZnO on sapphire (0001) substrates Journal of Applied Physics. ,vol. 91, pp. 874- 877 ,(2002) , 10.1063/1.1426238
E. A. Kraut, R. W. Grant, J. R. Waldrop, S. P. Kowalczyk, Precise Determination of the Valence-Band Edge in X-Ray Photoemission Spectra: Application to Measurement of Semiconductor Interface Potentials Physical Review Letters. ,vol. 44, pp. 1620- 1623 ,(1980) , 10.1103/PHYSREVLETT.44.1620