Direct growth of transparent conducting Nb-doped anatase TiO2 polycrystalline films on glass

摘要: This paper proposes a novel sputter-based method for the direct growth of transparent conducting Ti1−xNbxO2 (TNO) polycrystalline films on glass, without need any postdeposition treatments, by use an initial seed-layer. Anatase TNO epitaxial grown LaAlO3 (100) substrates under reducing atmosphere exhibited low resistivity (ρ) (3–6)×10−4Ωcm. On however, highly resistive rutile phase (ρ∼100Ωcm) formed preferentially same conditions. These results suggest that stabilization oxygen-deficient anatase occurs lattice-matched substrates. To produce similar effect glass surface, we deposited seed-layer with excellent crystallinity increased oxygen atmosphere. As result, could be even heavily atmospheres. An optimized film ρ=1.1×10−3Ωcm and optical absorption lower than 10% in visible region. ρ value is more...