Porous template and imprinting stack for nano-imprint lithography
作者： Niyaz Khusnatdinov , Edward Brian Fletcher , Sidlgata V. Sreenivasan , Frank Y. Xu , Weijun Liu
DOI:
关键词: Porosity 、 Nano- 、 Nanotechnology 、 Lithography 、 Pore size 、 Materials science 、 Lithography process
摘要: An imprint lithography template or imprinting stack includes a porous material defining multiplicity of pores with an average pore size at least about 0.4 nm. A porosity the is 10%. The template, stack, both may be used in process to facilitate diffusion gas trapped between and into both, such that polymerizable rapidly forms substantially continuous layer template.
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