Nano-imprint lithography template fabrication and treatment
作者： Fen Wan , Edward Brian Fletcher , Frank Y. Xu , Weijun Liu , Gerard M. Schmid
DOI:
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摘要: A nano-imprint lithography template includes a rigid support layer, cap and flexible cushion layer positioned between the layer. Treating an imprint heating to desorb gases from template. Heating radiating at selected wavelength with, for example, infrared radiation. The may correspond which material is strongly absorbing.
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