3-D Design and Simulation of a Piezoelectric Micropump
作者： Seyed Amir Fouad Farshchi Yazdi , Alberto Corigliano , Raffaele Ardito
DOI: 10.3390/MI10040259
关键词: Finite element method 、 Silicon 、 Outflow 、 Voltage 、 Flow (psychology) 、 Piezoelectricity 、 Micropump 、 Materials science 、 Acoustics 、 Multiphysics
摘要: The objective of this paper is to carefully study the performances a new piezoelectric micropump that could be used, e.g., for drug delivery or micro-cooling systems. proposed characterized by silicon diaphragms, with actuation at 60 V input voltage, and two passive valves flow output. By means 3-D Finite Element (FE) model, fluid dynamic response during different stages working cycle investigated, together fluid–structure interaction. maximum predicted outflow 1.62 μL min − 1 , obtained 10 Hz frequency. computational model enables optimization geometrical features, goal improve pumping efficiency: increased until 2.5 .
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