Effect of the Duty Cycle on the Microstructural, Mechanical and Tribological Properties of TiN Layers Deposited by PACVD
作者： M. S. Mahdipoor , M. Montazeri , M. Soltanieh , F. Mahboubi , Sh. Ahangarani
DOI: 10.1002/9781118062111.CH11
关键词: Materials science 、 Tin 、 Tribology 、 Metallurgy 、 Duty cycle
摘要:
sci-hub.st 参考文章(15)
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