作者: Coen Adrianus Verschuren , Menno Willem Jose Prins , Albert Hendrik Jan Immink
DOI:
关键词: Total external reflection 、 Refractive index 、 Optoelectronics 、 Total internal reflection 、 Beam (structure) 、 Microelectronics 、 Deflection (physics) 、 Reflection (physics) 、 Light beam 、 Materials science 、 Optics
摘要: The invention relates to a microelectronic sensor device with light source (21) for emitting an input beam (L1) into transparent carrier (11) such that it is totally internally reflected at contact surface (12) as output (L2), which detected by detector (31). Frustration of the total internal reflection can then example be used determine amount target particles (1) present this surface. further comprises refractive index measurement unit (100, 200, 300) measuring (nB) sample medium, and evaluation (50) evaluating (31) taking measured account and/or changing conditions (L1). may particularly designed infer from deflection test-light (L3) transmitted through or interface medium. In latter case, possible critical angle measure reflectivity interface.