Giant growth rate in nano-oxidation of p-silicon surfaces by using ethyl alcohol liquid bridges
作者： Marta Tello , Ricardo Garcı́a
DOI: 10.1063/1.1613799
关键词: Nanometre 、 Nano- 、 Silicon 、 Analytical chemistry 、 Chemistry 、 Nanolithography 、 Chemical engineering 、 Alcohol 、 Local oxidation nanolithography 、 Oxide 、 Aqueous solution 、 Physics and Astronomy (miscellaneous)
摘要: We demonstrate that local oxidation nanolithography can be performed in liquid environments different from aqueous solutions with a significant improvement the aspect ratio of fabricated motives. Here, we perform comparative study noncontact atomic force microscopy experiments water and ethyl alcohol. The growth rate oxides increased by almost an order magnitude using oxyanions alcohol molecules. propose enhanced is consequence reduction trapped charges within growing oxide. present results open possibility to directly fabricate vertical oxide structures while keeping lateral sizes nanometer range.
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Fundamental aspects of ultrathin dielectrics on si-based devices Kluwer Academic Publishers. ,(1998) , 10.1007/978-94-011-5008-8
Wolfgang Wernsdorfer, M. Faucher, B. Pannetier, V. Bouchiat, Christophe Thirion, T. Fournier, Josephson junctions and superconducting quantum interference devices made by local oxidation of niobium ultrathin films Applied Physics Letters. ,vol. 79, pp. 123- 125 ,(2001) , 10.1063/1.1382626
Y. Y. Wei, Gyula Eres, Self-limiting behavior of scanning-electron-beam-induced local oxidation of hydrogen-passivated silicon surfaces Applied Physics Letters. ,vol. 76, pp. 194- 196 ,(2000) , 10.1063/1.125700
Hiroyuki Sugimura, Nobuyuki Nakagiri, Chemical Approach to Nanofabrication: Modifications of Silicon Surfaces Patterned by Scanning Probe Anodization Japanese Journal of Applied Physics. ,vol. 34, pp. 3406- 3411 ,(1995) , 10.1143/JJAP.34.3406
K. Ensslin, M. Bichler, T. Heinzel, W. Wegscheider, T. Ihn, A. Dorn, A. Fuhrer, M. Sigrist, Electronic properties of antidot lattices fabricated by atomic force lithography Applied Physics Letters. ,vol. 80, pp. 252- 254 ,(2002) , 10.1063/1.1432767
E. S. Snow, P. M. Campbell, R. W. Rendell, F. A. Buot, D. Park, C. R. K. Marrian, R. Magno, A metal/oxide tunneling transistor Applied Physics Letters. ,vol. 72, pp. 3071- 3073 ,(1998) , 10.1063/1.121544
Ricardo García, Alvaro San Paulo, Dynamics of a vibrating tip near or in intermittent contact with a surface Physical Review B. ,vol. 61, ,(2000) , 10.1103/PHYSREVB.61.R13381
Montserrat Calleja, Ricardo Garcı́a, Nano-oxidation of silicon surfaces by noncontact atomic-force microscopy: Size dependence on voltage and pulse duration Applied Physics Letters. ,vol. 76, pp. 3427- 3429 ,(2000) , 10.1063/1.126856
E. B. Cooper, S. R. Manalis, H. Fang, H. Dai, K. Matsumoto, S. C. Minne, T. Hunt, C. F. Quate, Terabit-per-square-inch data storage with the atomic force microscope Applied Physics Letters. ,vol. 75, pp. 3566- 3568 ,(1999) , 10.1063/1.125390
Marta Tello, Ricardo Garcı́a, Nano-oxidation of silicon surfaces: Comparison of noncontact and contact atomic-force microscopy methods Applied Physics Letters. ,vol. 79, pp. 424- 426 ,(2001) , 10.1063/1.1385582