Chemical composition of GaAs oxides grown by local anodic oxidation: a spatially resolved Auger study
作者： M. Lazzarino , M. Padovani , G. Mori , L. Sorba , M. Fanetti
DOI: 10.1016/J.CPLETT.2004.12.019
关键词: Gallium 、 Chemical composition 、 Atomic force microscopy 、 Oxide 、 Auger electron spectroscopy 、 Spatially resolved 、 Analytical chemistry 、 Auger 、 Anodic oxidation 、 Chemistry
摘要: The chemistry of the GaAs oxides fabricated by local anodic oxidation (LAO) using an atomic force microscope is studied means spatially resolved Auger electron spectroscopy. Oxide structures with nanometric size grown at different bias are investigated. We found that LAO oxide essentially composed gallium oxides. chemical composition does not depend on applied bias.
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