Evidence of material mixing during local anodic oxidation nanolithography
作者： G. Mori , M. Lazzarino , D. Ercolani , G. Biasiol , L. Sorba
DOI: 10.1063/1.2136212
关键词:
摘要: We investigate the chemical properties of nanostructures fabricated by local anodic oxidation (LAO) on epitaxial GaAs∕AlAs∕GaAs layers. find evidence for presence Al compounds located in topmost surface layers LAO structures. Our results cannot be explained within framework commonly accepted mechanism that describes growth oxides terms diffusion oxygen-rich ions through growing oxide. A more general explains our experimental findings is proposed.
scitation.org
harvard.edu
aip.org
sci-hub.se 参考文章(30)
J.J. Yeh, I. Lindau, Atomic subshell photoionization cross sections and asymmetry parameters: 1 ⩽ Z ⩽ 103 Atomic Data and Nuclear Data Tables. ,vol. 32, pp. 1- 155 ,(1985) , 10.1016/0092-640X(85)90016-6
G. Mori, M. Lazzarino, D. Ercolani, L. Sorba, S. Heun, A. Locatelli, Desorption dynamics of oxide nanostructures fabricated by local anodic oxidation nanolithography Journal of Applied Physics. ,vol. 97, pp. 114324- ,(2005) , 10.1063/1.1923165
Emmanuel Dubois, Jean-Luc Bubendorff, Kinetics of scanned probe oxidation: Space-charge limited growth Journal of Applied Physics. ,vol. 87, pp. 8148- 8154 ,(2000) , 10.1063/1.373510
J. A. Dagata, F. Perez-Murano, C. Martin, H. Kuramochi, H. Yokoyama, Current, charge, and capacitance during scanning probe oxidation of silicon. I. Maximum charge density and lateral diffusion Journal of Applied Physics. ,vol. 96, pp. 2386- 2392 ,(2004) , 10.1063/1.1771820
Ricardo Garcı́a, Montserrat Calleja, Heinrich Rohrer, Patterning of silicon surfaces with noncontact atomic force microscopy: Field-induced formation of nanometer-size water bridges Journal of Applied Physics. ,vol. 86, pp. 1898- 1903 ,(1999) , 10.1063/1.370985
G. Mori, M. Lazzarino, D. Ercolani, G. Biasiol, L. Sorba, Magnetic field and temperature dependence of an atomic force microscope-defined quantum point contact Journal of Vacuum Science & Technology B. ,vol. 22, pp. 570- 573 ,(2004) , 10.1116/1.1648065
S-D Tzeng, C-L Wu, Y-C You, TT Chen, S Gwo, H Tokumoto, None, Charge imaging and manipulation using carbon nanotube probes Applied Physics Letters. ,vol. 81, pp. 5042- 5044 ,(2002) , 10.1063/1.1530377
J. A. Dagata, T. Inoue, J. Itoh, H. Yokoyama, Understanding scanned probe oxidation of silicon Applied Physics Letters. ,vol. 73, pp. 271- 273 ,(1998) , 10.1063/1.121777
M. P. Seah, W. A. Dench, Quantitative electron spectroscopy of surfaces: A standard data base for electron inelastic mean free paths in solids Surface and Interface Analysis. ,vol. 1, pp. 2- 11 ,(1979) , 10.1002/SIA.740010103
D. Ercolani, M. Lazzarino, G. Mori, B. Ressel, L. Sorba, A. Locatelli, S. Cherifi, A. Ballestrazzi, S. Heun, GaAs Oxide Desorption under Extreme Ultraviolet Photon Flux Advanced Functional Materials. ,vol. 15, pp. 587- 592 ,(2005) , 10.1002/ADFM.200400033