Fabrication of pure-perovskite PMN–PT thin films on SrTiO3 substrates using pulsed laser deposition
作者： Jie Shang , Hui Zhang , Yong Li , Xiaofang Zhou , Pengxiang Zhang
DOI: 10.1016/J.JCRYSGRO.2010.03.012
关键词: Carbon film 、 Deposition (phase transition) 、 Thin film 、 Combustion chemical vapor deposition 、 Fabrication 、 Analytical chemistry 、 Pulsed laser deposition 、 Titanate 、 Perovskite (structure) 、 Materials science 、 Inorganic chemistry 、 Materials Chemistry 、 Condensed matter physics
摘要: Abstract Lead magnesium niobate–lead titanate ((1− x )Pb(Mg 1/3 Nb 2/3 )O 3 – PbTiO ( =0.20,0.33,0.50), PMN–PT) thin films have been successfully deposited on SrTiO (1 0 0) substrates by pulsed laser deposition (PLD). The result of X-ray diffraction (XRD) showed that the PMN–PT were c -orientated. effects conditions, such as temperature, oxygen pressure, repeated frequency, cooling rate, energy and post annealing, studied first thin-film quality. It was found temperature very different for mole fractions films. range high-qualitied is narrow, about ±2 °C. Such harsh conditions are rare in other films, which also main reason why difficult to prepare.
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sci-hub.se 参考文章(21)
C. Tantigate, J. Lee, A. Safari, Processing and properties of Pb(Mg1/3Nb2/3)O3–PbTiO3 thin films by pulsed laser deposition Applied Physics Letters. ,vol. 66, pp. 1611- 1613 ,(1995) , 10.1063/1.113868
S.L. Swartz, T.R. Shrout, Fabrication of perovskite lead magnesium niobate Materials Research Bulletin. ,vol. 17, pp. 1245- 1250 ,(1982) , 10.1016/0025-5408(82)90159-3
Wen Gong, Jing-Feng Li, Xiangcheng Chu, Longtu Li, Texture Control of Sol‐Gel Derived Pb(Mg1/3Nb2/3)O3–PbTiO3 Thin Films Using Seeding Layer Journal of the American Ceramic Society. ,vol. 87, pp. 1031- 1034 ,(2004) , 10.1111/J.1551-2916.2004.01031.X
Sut Kam Ho, Fei Fei Hau, Kin Hung Wong, Enhanced Dielectric Properties of [Pb(Mg1/3Nb2/3)O3]0.9–PbTiO3]0.1Thin Films Grown on BaPbO3Perovskite Electrode Japanese Journal of Applied Physics. ,vol. 43, pp. 7600- 7603 ,(2004) , 10.1143/JJAP.43.7600
Qifa Zhou, Qingqi Zhang, Baomin Xu, Susan Trolier-McKinstry, In-Plane Polarized 0.7Pb(Mg1/3Nb2/3)O3–0.3PbTiO3 Thin Films Journal of the American Ceramic Society. ,vol. 85, pp. 1997- 2000 ,(2002) , 10.1111/J.1151-2916.2002.TB00394.X
M.C. Jiang, T.B. Wu, The effect of electrode composition on rf magnetron sputtering deposition of Pb[(Mg1/3Nb2/3)0.7Ti0.3]O3 films Journal of Materials Research. ,vol. 9, pp. 1879- 1886 ,(1994) , 10.1557/JMR.1994.1879
K.L. Saenger, R.A. Roy, D.B. Beach, K.F. Etzold, Pulsed Laser Deposition of High-Epsilon Dielectrics: PMN and PMN-PT MRS Proceedings. ,vol. 285, pp. 421- 426 ,(1992) , 10.1557/PROC-285-421
Z. Kighelman, D. Damjanovic, A. Seifert, L. Sagalowicz, N. Setter, Relaxor behavior and electromechanical properties of Pb(Mg1/3Nb2/3)O3 thin films Applied Physics Letters. ,vol. 73, pp. 2281- 2283 ,(1998) , 10.1063/1.121702
Jeon-Kook Lee, Dongkyun Park, Deok-Soo Cheong, Jong-Wan Park, Chul Soon Park, Phase development of radio-frequency magnetron sputter-deposited Pb(Mg1/3Nb2/3)O3–PbTiO3 (90/10) thin films Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 18, pp. 1659- 1662 ,(2000) , 10.1116/1.582402
N. J. Donnelly, G. Catalan, C. Morros, R. M. Bowman, J. M. Gregg, Dielectric and electromechanical properties of Pb(Mg1/3,Nb2/3)O3–PbTiO3 thin films grown by pulsed laser deposition Journal of Applied Physics. ,vol. 93, pp. 9924- 9929 ,(2003) , 10.1063/1.1574181