作者: Dong-Hoon Jang , Jeong-Dong Choe , Young-bae Yoon , Ki-Hyun Kim , Hee-Soo Kang
DOI:
关键词: Parasitic capacitance 、 Homogeneous 、 Substrate (printing) 、 Electrical engineering 、 Engineering 、 Contact formation 、 Non-volatile memory 、 String (computer science) 、 Bit line 、 Field (physics)
摘要: Provided are non-volatile memory devices and methods of fabricating the same, including improved bit line contact formation that may reduce resistance parasitic capacitance, thereby reducing manufacturing costs improving device performance. The include a substrate; plurality field regions formed on substrate, each homogeneous first second is divided into two sub via bridge region; an active region substrate defined as having string structure by regions, where at least strings be connected one regions; shared lines to contacts, contacts direct contacts.