作者: J. Frougier , N. Shukla , D. Deng , M. Jerry , A. Aziz
DOI: 10.1109/VLSIT.2016.7573445
关键词: Silicon 、 MOSFET 、 Optoelectronics 、 Current (fluid) 、 Phase transition 、 Node (physics) 、 Electronic engineering 、 Phase (waves) 、 Materials science 、 Electrical resistivity and conductivity 、 Ring oscillator
摘要: … the performance of 14nm node FinFETs. Our analysis shows … FETs using Cu-doped HfO2 threshold switches. Introduction: … 14nm ULP FinFET and Cu-dopedHfO2 based Phase-FET. (b…