In-situ elastic strain mapping during micromechanical testing using EBSD.
作者： Mark J. McLean , William A. Osborn
DOI: 10.1016/J.ULTRAMIC.2017.11.007
关键词: Strain (chemistry) 、 Finite element method 、 Digital image correlation 、 Geometry 、 Electron backscatter diffraction 、 Sensitivity (control systems) 、 Image resolution 、 Accuracy and precision 、 Rotation (mathematics) 、 Materials science
摘要: Compared to more commonly used strain measurement techniques, electron backscatter diffraction (EBSD) offers improved spatial resolution and sensitivity. Additionally, EBSD can provide the full deformation tensor, whereas other such as digital image correlation (DIC), are limited only in-plane strains rotations. In this work, was measure rotations in-situ during testing of a single-crystal silicon micromechanical test specimen. The theta-like specimen geometry chosen due complex spatially-varying states that exist in circular frame sample testing, well nominally uniform central web. Full-field maps were generated for each rotation component compared those from finite element analyses (FEA), showing strong agreement all cases. potential sources error their impact on both accuracy uncertainty discussed.
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