作者: Yoshiaki Shimooka , Yoshiaki Sugizaki , Kei Obara
DOI:
关键词: Materials science 、 Modulus 、 Substrate (printing) 、 Layer (electronics) 、 Electronic engineering 、 Composite material 、 Component (thermodynamics)
摘要: According to one embodiment, an electrical component comprises a substrate, functional element formed on the first layer which includes through holes, and forms cavity that stores second is layer, closes holes. The film, film third film. A Young's modulus of higher than