Mems device and manufacturing method thereof
作者： Yoshiaki Shimooka
DOI:
关键词: Microelectromechanical systems 、 Engineering 、 Mechanical engineering 、 Structural engineering
摘要: A MEMS device includes: a movable element supported by supporting member on substrate; an encapsulation structure provided above the substrate so as to encapsulate element; and fin that is made of insulation film, substrate, inside outside element, part being positioned between height from when are turned ON OFF.
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