Electrical device including a functional element in a cavity
作者： Akihiro Kojima , Yoshiaki Sugizaki , Yoshiaki Shimooka
DOI:
关键词: Elasticity (economics) 、 Electrical devices 、 Materials science 、 Electrical engineering 、 Composite material
摘要: A substrate includes a functional element. An insulating first film forms cavity which stores the element, together with substrate, and plurality of through-holes. second covers through-holes, is formed on film, has gas permeability higher than that film. third lower fourth an elasticity larger
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